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HomeProduct name listTetramethylammonium hydroxide

Tetramethylammonium hydroxide

Synonym(s):TMAH solution

  • CAS NO.:75-59-2
  • Empirical Formula: C4H13NO
  • Molecular Weight: 91.15
  • MDL number: MFCD00008280
  • EINECS: 200-882-9
  • SAFETY DATA SHEET (SDS)
  • Update Date: 2023-09-13 15:26:14
Tetramethylammonium hydroxide Structural

What is Tetramethylammonium hydroxide?

Description

Tetramethylammonium hydroxide is a solid in the hydrated form or a colorless liquid with a strong ammonia-like odor. It is soluble in water, and corrosive to metals and tissue.

Chemical properties

colourless to yellow liquid

The Uses of Tetramethylammonium hydroxide

Tetramethylammonium hydroxide is used to produce tetramethyl-ammonium azide. It is used as an anisotropic etchant of silicon, basic solvent in the development of acidic photoresist in photolithography process, as surfactant in the synthesis of ferrofluid and as a polarographic reagent. It finds application in the production of organic silicon, where it is used for computer silicon wafer surface brightener and cleaning agent. It is also involved in the purification of some metallic elements.

The Uses of Tetramethylammonium hydroxide

Industry
Application
Role/benefit
Organic silicon
Production of dimethyl silicone oil, organic silicon resin, silicon rubber, etc.
Catalyst/removed easily; no pollution to the products
Chemical analysis
Polarography experiment
Polarographic reagent
Thermochemolysis to study fungal degradation of wood
Analytical reagent
Chemical purification
Removal of metal elements
Ash free alkali/source of base; make the metal elements precipitated
Electron
Production of computer silicon chip
Brightening agent; anisotropic etching agent; cleaning agent; photoresist developer
Printing of circuit board
Cleaning agent
Semiconductor manufacturing
Chemical stripper
Others
Synthesis of ferrofluid
Surfactant/ inhibit nanoparticle aggregation
Synthesis of zeolite
Structure directing agent

The Uses of Tetramethylammonium hydroxide

Tetramethylammonium hydroxide solution (25 wt.% solution in water) may be used as a base for pH adjustment to obtain hexagonal mesoporous aluminophosphate (TAP).

General Description

Tetramethylammonium hydroxide is a quaternary ammonium salt generally used as an anisotropic etchant for silicon due to its high silicon etching rate.

Reactivity Profile

Tetramethylammonium hydroxide acts like a base. Bases are chemically similar to sodium hydroxide (NaOH) or sodium oxide (Na2O). They neutralize acids exothermically to form salts plus water. When soluble in water they give solutions having a pH greater than 7.0. Mixing these materials with water can generate troublesome amounts of heat as the base is dissolved or diluted. Bases react with certain metals (such as aluminum and zinc) to form oxides or hydroxides of the metal and generate gaseous hydrogen. Bases may initiate polymerization reactions in polymerizable organic compounds, especially epoxides). They may generate flammable and/or toxic gases with ammonium salts, nitrides, halogenated organics, various metals, peroxides, and hydroperoxides. Materials of this group often serve as catalysts.

Hazard

Strong irritant to skin and tissue.

Health Hazard

TOXIC; inhalation, ingestion or skin contact with material may cause severe injury or death. Contact with molten substance may cause severe burns to skin and eyes. Avoid any skin contact. Effects of contact or inhalation may be delayed. Fire may produce irritating, corrosive and/or toxic gases. Runoff from fire control or dilution water may be corrosive and/or toxic and cause pollution.

Fire Hazard

Combustible material: may burn but does not ignite readily. When heated, vapors may form explosive mixtures with air: indoors, outdoors and sewers explosion hazards. Contact with metals may evolve flammable hydrogen gas. Containers may explode when heated. Runoff may pollute waterways. Substance may be transported in a molten form.

Safety Profile

Poison by subcutaneous route. A powerful caustic. A corrosive irritant to skin, eyes, and mucous membranes. When heated to decomposition it emits toxic fumes of NOx and NH3.

Purification Methods

It is freed from chloride ions by passage through an ion-exchange column (e.g. Amberlite IRA-400, prepared in its OH-form by passing 2M NaOH until the effluent is free from chloride ions, then washed with distilled H2O until neutral). A modification, to obtain carbonate-free hydroxide, uses the method of Davies and Nancollas [Nature 165 237 1950]. [Beilstein 4 IV 145.]

References

1.https://en.wikipedia.org/wiki/Tetramethylammonium_hydroxide#Uses
2.http://sacheminc.com/other-chemicals/tetramethylammonium-hydroxide-tmah/
3.https://www.fs.usda.gov/treesearch/pubs/15506
4.https://www.concordia.ca/content/dam/concordia/services/safety/docs/EHS-DOC-020_TMAHGuidelines.pdf
5.https://www.chemicalbook.com/ChemicalProductProperty_EN_CB2854236.htm

Properties of Tetramethylammonium hydroxide

Melting point: °C
Boiling point: 110 °C
Density  0.866 g/mL at 25 °C
vapor pressure  17.5 mm Hg ( 20 °C)
refractive index  n20/D 1.384
Flash point: 80 °F
storage temp.  Store below +30°C.
solubility  Methanol (Sparingly), Water (Slightly)
form  Solution
color  APHA: ≤10
PH >13 (H2O, 20°C)
Odor strong ammonia-like odor
Water Solubility  Soluble in water.
Sensitive  Air Sensitive
Merck  14,9224
BRN  3558708
Stability: Stable. Flammable. Incompatible with strong oxidizing agents, strong acids.
CAS DataBase Reference 75-59-2(CAS DataBase Reference)
EPA Substance Registry System Tetramethylammonium hydroxide (75-59-2)

Safety information for Tetramethylammonium hydroxide

Signal word Danger
Pictogram(s)
ghs
Flame
Flammables
GHS02
ghs
Corrosion
Corrosives
GHS05
ghs
Skull and Crossbones
Acute Toxicity
GHS06
ghs
Health Hazard
GHS08
GHS Hazard Statements H226:Flammable liquids
H314:Skin corrosion/irritation
H331:Acute toxicity,inhalation
H370:Specific target organ toxicity, single exposure
H372:Specific target organ toxicity, repeated exposure
H412:Hazardous to the aquatic environment, long-term hazard
Precautionary Statement Codes P210:Keep away from heat/sparks/open flames/hot surfaces. — No smoking.
P273:Avoid release to the environment.
P280:Wear protective gloves/protective clothing/eye protection/face protection.
P303+P361+P353:IF ON SKIN (or hair): Remove/Take off Immediately all contaminated clothing. Rinse SKIN with water/shower.
P305+P351+P338:IF IN EYES: Rinse cautiously with water for several minutes. Remove contact lenses, if present and easy to do. Continuerinsing.

Computed Descriptors for Tetramethylammonium hydroxide

InChIKey WGTYBPLFGIVFAS-UHFFFAOYSA-M

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