TUNGSTEN SILICIDE
- CAS NO.:12039-88-2
- Empirical Formula: Si2W
- Molecular Weight: 240.01
- MDL number: MFCD00049704
- EINECS: 234-909-0
- SAFETY DATA SHEET (SDS)
- Update Date: 2024-05-31 14:52:23
What is TUNGSTEN SILICIDE?
Description
Tungsten silicide (WSi2) is an inorganic compound, a silicide of tungsten. It is an electrically conductive ceramic material. Tungsten silicide can react violently with substances such as strong acids, fluorine, oxidizers, and interhalogens. It is employed in microelectronics as a contact material, with a resistivity of 60-80 μΩ cm; it forms at 1000℃. It is frequently used as a shunt over polysilicon lines to increase their conductivity and increase signal speed.
Chemical properties
Blue-gray, very hard solid. Insoluble in water; attacked by fused alkalies and mixture of nitric and hydrofluoric acids.
The Uses of TUNGSTEN SILICIDE
Tungsten silicide is used in microelectronics as a contact material. It is also used as a shunt over polysilicon lines to increase their conductivity and increase signal speed. Further, it acts as a barrier layer between silicon and other metals. In addition to this, it is used in microelectro mechanical systems and for oxidation-resistant coatings. It is also employed as a replacement for earlier tungsten films.
The Uses of TUNGSTEN SILICIDE
Oxidation-resistant coatings, electrical resistance and refractory applications.
Hazard
Dust flammable.
Properties of TUNGSTEN SILICIDE
Melting point: | 2165°C |
Density | 9,88 g/cm3 |
solubility | insoluble in H2O |
form | Powder |
Specific Gravity | 9.88 |
color | blue-gray tetragonal crystals, crystalline |
Resistivity | 33.4 (ρ/μΩ.cm) |
Water Solubility | Insoluble in water. |
Hydrolytic Sensitivity | 2: reacts with aqueous acid |
Crystal Structure | Tetragonal |
Exposure limits | ACGIH: TWA 3 mg/m3 NIOSH: TWA 5 mg/m3; STEL 10 mg/m3 |
CAS DataBase Reference | 12039-88-2 |
EPA Substance Registry System | Tungsten silicide (WSi2) (12039-88-2) |
Safety information for TUNGSTEN SILICIDE
Computed Descriptors for TUNGSTEN SILICIDE
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