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HomeProduct name list1,1,3,3-Tetramethyldisilazane

1,1,3,3-Tetramethyldisilazane

Synonym(s):TMDS

  • CAS NO.:15933-59-2
  • Empirical Formula: C4H15NSi2
  • Molecular Weight: 133.34
  • MDL number: MFCD00025626
  • EINECS: 240-072-2
  • SAFETY DATA SHEET (SDS)
  • Update Date: 2024-08-21 22:41:43
1,1,3,3-Tetramethyldisilazane Structural

What is 1,1,3,3-Tetramethyldisilazane?

Chemical properties

Clear colorless to faintly yellow liquid

Physical properties

bp 99–100 °C; n20 D 1.4040; d 0.752 g cm?3.

The Uses of 1,1,3,3-Tetramethyldisilazane

Tetramethyldisilazane is used as a gas chromatographic derivatizing reagent. Further, it reacts with phenol to prepare dimethylphenoxysilane. In addition, it is used in electronic, polymer and pharmaceutical industries.

The Uses of 1,1,3,3-Tetramethyldisilazane

1,1,3,3-Tetramethyldisilazane is widely used in intramolecular hydrosilation of allyl alcohols, homoallyl alcohols, and homopropargyl alcohols for the regio- and stereoselective synthesis of polyols

Properties and Applications

The ICP CVD synthesis of SiCxNy: H thin films using 1,1,3,3-tetramethyldisilazane (TMDSZ ) as a single-source precursor and argon as a gas-activator[1]. Using TMDSZ as the single-source compound produced amorphous hydrogenated silicon carbonitride (a-SiCN: H) films, whereas no such films were formed when HMDSZ was used, which was attributed to the lack of Si–H bond in HMDSZ. Under the collision-free condition, the formation of ?CH3, NH3, and DMSA was demonstrated from the decomposition of TMDSZ on the heated W filament. Free-radical short-chain reactions dominate the secondary gas-phase reactions of TMDSZ in the reactor setup. The short-chain reaction is initiated by the formation of methyl radicals via the cleavage of the Si–CH3 bonds of TMDSZ. The H abstraction by the produced methyl radicals from the Si–H or the C–H bond in various stable molecules (e.g., TMDSZ) propagates the chain with a resulting radical, which recombines with another radical to terminate the chain reactions, producing a series of products in the high-mass region[2].

References

[1] Maksim N. Chagin. “Synthesis, Properties and Aging of ICP-CVD SiCxNy:H Films Formed from Tetramethyldisilazane.” Coatings (2022).
[2] James Michael Stevenson, Eric Ampong and Yujun Shi*. “Understanding the Reaction Chemistry of 1,1,3,3-Tetramethyldisilazane as a Precursor Gas in a Catalytic Chemical Vapor Deposition Process.” The Journal of Physical Chemistry A 127 44 (2023): 9185–9195.

Properties of 1,1,3,3-Tetramethyldisilazane

Melting point: 99-100 °C
Boiling point: 99-100 °C
Density  0.752 g/mL at 25 °C(lit.)
refractive index  n20/D 1.404(lit.)
Flash point: 17 °F
storage temp.  Store below +30°C.
solubility  Miscible with common organic solvents.
form  clear liquid
pka 9.80±0.70(Predicted)
Specific Gravity 0.752
color  Colorless to Almost colorless
Sensitive  Moisture Sensitive
Hydrolytic Sensitivity 7: reacts slowly with moisture/water
BRN  741869
CAS DataBase Reference 15933-59-2(CAS DataBase Reference)
EPA Substance Registry System Silanamine, N-(dimethylsilyl)-1,1-dimethyl- (15933-59-2)

Safety information for 1,1,3,3-Tetramethyldisilazane

Signal word Danger
Pictogram(s)
ghs
Flame
Flammables
GHS02
ghs
Exclamation Mark
Irritant
GHS07
GHS Hazard Statements H225:Flammable liquids
H315:Skin corrosion/irritation
H319:Serious eye damage/eye irritation
H335:Specific target organ toxicity, single exposure;Respiratory tract irritation
Precautionary Statement Codes P210:Keep away from heat/sparks/open flames/hot surfaces. — No smoking.
P302+P352:IF ON SKIN: wash with plenty of soap and water.
P305+P351+P338:IF IN EYES: Rinse cautiously with water for several minutes. Remove contact lenses, if present and easy to do. Continuerinsing.

Computed Descriptors for 1,1,3,3-Tetramethyldisilazane

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