1,1,3,3-Tetramethyldisilazane
Synonym(s):TMDS
- CAS NO.:15933-59-2
- Empirical Formula: C4H15NSi2
- Molecular Weight: 133.34
- MDL number: MFCD00025626
- EINECS: 240-072-2
- SAFETY DATA SHEET (SDS)
- Update Date: 2024-08-21 22:41:43
What is 1,1,3,3-Tetramethyldisilazane?
Chemical properties
Clear colorless to faintly yellow liquid
Physical properties
bp 99–100 °C; n20 D 1.4040; d 0.752 g cm?3.
The Uses of 1,1,3,3-Tetramethyldisilazane
Tetramethyldisilazane is used as a gas chromatographic derivatizing reagent. Further, it reacts with phenol to prepare dimethylphenoxysilane. In addition, it is used in electronic, polymer and pharmaceutical industries.
The Uses of 1,1,3,3-Tetramethyldisilazane
1,1,3,3-Tetramethyldisilazane is widely used in intramolecular hydrosilation of allyl alcohols, homoallyl alcohols, and homopropargyl alcohols for the regio- and stereoselective synthesis of polyols
Properties and Applications
The ICP CVD synthesis of SiCxNy: H thin films using 1,1,3,3-tetramethyldisilazane (TMDSZ ) as a single-source precursor and argon as a gas-activator[1]. Using TMDSZ as the single-source compound produced amorphous hydrogenated silicon carbonitride (a-SiCN: H) films, whereas no such films were formed when HMDSZ was used, which was attributed to the lack of Si–H bond in HMDSZ. Under the collision-free condition, the formation of ?CH3, NH3, and DMSA was demonstrated from the decomposition of TMDSZ on the heated W filament. Free-radical short-chain reactions dominate the secondary gas-phase reactions of TMDSZ in the reactor setup. The short-chain reaction is initiated by the formation of methyl radicals via the cleavage of the Si–CH3 bonds of TMDSZ. The H abstraction by the produced methyl radicals from the Si–H or the C–H bond in various stable molecules (e.g., TMDSZ) propagates the chain with a resulting radical, which recombines with another radical to terminate the chain reactions, producing a series of products in the high-mass region[2].
References
[1] Maksim N. Chagin. “Synthesis, Properties and Aging of ICP-CVD SiCxNy:H Films Formed from Tetramethyldisilazane.” Coatings (2022).
[2] James Michael Stevenson, Eric Ampong and Yujun Shi*. “Understanding the Reaction Chemistry of 1,1,3,3-Tetramethyldisilazane as a Precursor Gas in a Catalytic Chemical Vapor Deposition Process.” The Journal of Physical Chemistry A 127 44 (2023): 9185–9195.
Properties of 1,1,3,3-Tetramethyldisilazane
Melting point: | 99-100 °C |
Boiling point: | 99-100 °C |
Density | 0.752 g/mL at 25 °C(lit.) |
refractive index | n |
Flash point: | 17 °F |
storage temp. | Store below +30°C. |
solubility | Miscible with common organic solvents. |
form | clear liquid |
pka | 9.80±0.70(Predicted) |
Specific Gravity | 0.752 |
color | Colorless to Almost colorless |
Sensitive | Moisture Sensitive |
Hydrolytic Sensitivity | 7: reacts slowly with moisture/water |
BRN | 741869 |
CAS DataBase Reference | 15933-59-2(CAS DataBase Reference) |
EPA Substance Registry System | Silanamine, N-(dimethylsilyl)-1,1-dimethyl- (15933-59-2) |
Safety information for 1,1,3,3-Tetramethyldisilazane
Signal word | Danger |
Pictogram(s) |
Flame Flammables GHS02 Exclamation Mark Irritant GHS07 |
GHS Hazard Statements |
H225:Flammable liquids H315:Skin corrosion/irritation H319:Serious eye damage/eye irritation H335:Specific target organ toxicity, single exposure;Respiratory tract irritation |
Precautionary Statement Codes |
P210:Keep away from heat/sparks/open flames/hot surfaces. — No smoking. P302+P352:IF ON SKIN: wash with plenty of soap and water. P305+P351+P338:IF IN EYES: Rinse cautiously with water for several minutes. Remove contact lenses, if present and easy to do. Continuerinsing. |
Computed Descriptors for 1,1,3,3-Tetramethyldisilazane
New Products
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