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HomeProduct name list1,1,3,3-Tetramethyldisilazane

1,1,3,3-Tetramethyldisilazane

Synonym(s):TMDS

  • CAS NO.:15933-59-2
  • Empirical Formula: C4H15NSi2
  • Molecular Weight: 133.34
  • MDL number: MFCD00025626
  • EINECS: 240-072-2
  • SAFETY DATA SHEET (SDS)
  • Update Date: 2024-08-21 22:41:43
1,1,3,3-Tetramethyldisilazane Structural

What is 1,1,3,3-Tetramethyldisilazane?

Chemical properties

Clear colorless to faintly yellow liquid

Physical properties

bp 99–100 °C; n20 D 1.4040; d 0.752 g cm?3.

The Uses of 1,1,3,3-Tetramethyldisilazane

1,1,3,3-Tetramethyldisilazane is widely used in intramolecular hydrosilation of allyl alcohols, homoallyl alcohols, and homopropargyl alcohols for the regio- and stereoselective synthesis of polyols

The Uses of 1,1,3,3-Tetramethyldisilazane

Tetramethyldisilazane is used as a gas chromatographic derivatizing reagent. Further, it reacts with phenol to prepare dimethylphenoxysilane. In addition, it is used in electronic, polymer and pharmaceutical industries.

Properties and Applications

The ICP CVD synthesis of SiCxNy: H thin films using 1,1,3,3-tetramethyldisilazane (TMDSZ ) as a single-source precursor and argon as a gas-activator[1]. Using TMDSZ as the single-source compound produced amorphous hydrogenated silicon carbonitride (a-SiCN: H) films, whereas no such films were formed when HMDSZ was used, which was attributed to the lack of Si–H bond in HMDSZ. Under the collision-free condition, the formation of ?CH3, NH3, and DMSA was demonstrated from the decomposition of TMDSZ on the heated W filament. Free-radical short-chain reactions dominate the secondary gas-phase reactions of TMDSZ in the reactor setup. The short-chain reaction is initiated by the formation of methyl radicals via the cleavage of the Si–CH3 bonds of TMDSZ. The H abstraction by the produced methyl radicals from the Si–H or the C–H bond in various stable molecules (e.g., TMDSZ) propagates the chain with a resulting radical, which recombines with another radical to terminate the chain reactions, producing a series of products in the high-mass region[2].

References

[1] Maksim N. Chagin. “Synthesis, Properties and Aging of ICP-CVD SiCxNy:H Films Formed from Tetramethyldisilazane.” Coatings (2022).
[2] James Michael Stevenson, Eric Ampong and Yujun Shi*. “Understanding the Reaction Chemistry of 1,1,3,3-Tetramethyldisilazane as a Precursor Gas in a Catalytic Chemical Vapor Deposition Process.” The Journal of Physical Chemistry A 127 44 (2023): 9185–9195.

Properties of 1,1,3,3-Tetramethyldisilazane

Melting point: 99-100 °C
Boiling point: 99-100 °C
Density  0.752 g/mL at 25 °C(lit.)
refractive index  n20/D 1.404(lit.)
Flash point: 17 °F
storage temp.  Store below +30°C.
solubility  Miscible with common organic solvents.
form  clear liquid
pka 9.80±0.70(Predicted)
Specific Gravity 0.752
color  Colorless to Almost colorless
Sensitive  Moisture Sensitive
Hydrolytic Sensitivity 7: reacts slowly with moisture/water
BRN  741869
CAS DataBase Reference 15933-59-2(CAS DataBase Reference)
EPA Substance Registry System Silanamine, N-(dimethylsilyl)-1,1-dimethyl- (15933-59-2)

Safety information for 1,1,3,3-Tetramethyldisilazane

Signal word Danger
Pictogram(s)
ghs
Flame
Flammables
GHS02
ghs
Exclamation Mark
Irritant
GHS07
GHS Hazard Statements H225:Flammable liquids
H315:Skin corrosion/irritation
H319:Serious eye damage/eye irritation
H335:Specific target organ toxicity, single exposure;Respiratory tract irritation
Precautionary Statement Codes P210:Keep away from heat/sparks/open flames/hot surfaces. — No smoking.
P302+P352:IF ON SKIN: wash with plenty of soap and water.
P305+P351+P338:IF IN EYES: Rinse cautiously with water for several minutes. Remove contact lenses, if present and easy to do. Continuerinsing.

Computed Descriptors for 1,1,3,3-Tetramethyldisilazane

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