TRIS(DIMETHYLAMINO)SILANE

Synonym(s):TDMAS;Tris(dimethylamino)silane;Tris(dimethylamido)silane;(Me₂N)₃SiH;N,N,N′,N′,N′′, N′′-Hexamethylsilanetriamine

CAS NO.：15112-89-7
Empirical Formula: C6H19N3Si
Molecular Weight: 161.32
MDL number: MFCD00048006
EINECS: 239-165-0
SAFETY DATA SHEET (SDS)
Update Date: 2024-07-15 16:45:23

What is TRIS(DIMETHYLAMINO)SILANE?

The Uses of TRIS(DIMETHYLAMINO)SILANE

Tris(dimethylamino)silane (TDMAS) is used as an organosilicon source for the deposition of Si oxynitride; carbonitride; nitride and oxide thin films. It is also used to form multicomponent silicon containing thin films. The depositions can be carried out at low substrate temperatures (<150). The melting point and vapor pressure of TDMAS is in a suitable working range; thus making it a very good vapor deposition precursor.

General Description

Please inquire for quantity, pricing, and packaging options.

Properties of TRIS(DIMETHYLAMINO)SILANE

Melting point:	<0°C
Boiling point:	145 °C
Density	0,838 g/cm³
refractive index	1.4247
Flash point:	25°C
form	liquid
pka	10.93±0.70(Predicted)
color	colorless to light yellow
Specific Gravity	0.84
Hydrolytic Sensitivity	8: reacts rapidly with moisture, water, protic solvents
Sensitive	air sensitive, moisture sensitive
EPA Substance Registry System	N,N,N',N',N'',N''-Hexamethylsilanetriamine (15112-89-7)

Safety information for TRIS(DIMETHYLAMINO)SILANE

Signal word	Danger
Pictogram(s)	Flame Flammables GHS02 Corrosion Corrosives GHS05 Skull and Crossbones Acute Toxicity GHS06
GHS Hazard Statements	H225:Flammable liquids H261:Substances And Mixtures Which, In Contact With Water,Emit Flammable Gases H302:Acute toxicity,oral H311:Acute toxicity,dermal H314:Skin corrosion/irritation H330:Acute toxicity,inhalation
Precautionary Statement Codes	P210:Keep away from heat/sparks/open flames/hot surfaces. — No smoking. P280:Wear protective gloves/protective clothing/eye protection/face protection. P231+P232:Handle under inert gas. Protect from moisture. P303+P361+P353:IF ON SKIN (or hair): Remove/Take off Immediately all contaminated clothing. Rinse SKIN with water/shower. P305+P351+P338:IF IN EYES: Rinse cautiously with water for several minutes. Remove contact lenses, if present and easy to do. Continuerinsing.