TRIS(DIMETHYLAMINO)SILANE
Synonym(s):TDMAS;Tris(dimethylamino)silane;Tris(dimethylamido)silane;(Me2N)3SiH;N,N,N′,N′,N′′, N′′-Hexamethylsilanetriamine
- CAS NO.：15112-89-7
- Empirical Formula: C6H19N3Si
- Molecular Weight: 161.32
- MDL number: MFCD00048006
- EINECS: 239-165-0
- SAFETY DATA SHEET (SDS)
- Update Date: 2024-07-15 16:45:23
What is TRIS(DIMETHYLAMINO)SILANE?
The Uses of TRIS(DIMETHYLAMINO)SILANE
Tris(dimethylamino)silane (TDMAS) is used as an organosilicon source for the deposition of Si oxynitride; carbonitride; nitride and oxide thin films. It is also used to form multicomponent silicon containing thin films. The depositions can be carried out at low substrate temperatures (<150). The melting point and vapor pressure of TDMAS is in a suitable working range; thus making it a very good vapor deposition precursor.
General Description
Please inquire for quantity, pricing, and packaging options.
Properties of TRIS(DIMETHYLAMINO)SILANE
| Melting point: | <0°C |
| Boiling point: | 145 °C |
| Density | 0,838 g/cm3 |
| refractive index | 1.4247 |
| Flash point: | 25°C |
| form | liquid |
| pka | 10.93±0.70(Predicted) |
| color | colorless to light yellow |
| Specific Gravity | 0.84 |
| Hydrolytic Sensitivity | 8: reacts rapidly with moisture, water, protic solvents |
| Sensitive | air sensitive, moisture sensitive |
| EPA Substance Registry System | N,N,N',N',N'',N''-Hexamethylsilanetriamine (15112-89-7) |
Safety information for TRIS(DIMETHYLAMINO)SILANE
| Signal word | Danger |
| Pictogram(s) |
 Flame Flammables GHS02  Corrosion Corrosives GHS05  Skull and Crossbones Acute Toxicity GHS06 |
| GHS Hazard Statements |
H225:Flammable liquids H261:Substances And Mixtures Which, In Contact With Water,Emit Flammable Gases H302:Acute toxicity,oral H311:Acute toxicity,dermal H314:Skin corrosion/irritation H330:Acute toxicity,inhalation |
| Precautionary Statement Codes |
P210:Keep away from heat/sparks/open flames/hot surfaces. — No smoking. P280:Wear protective gloves/protective clothing/eye protection/face protection. P231+P232:Handle under inert gas. Protect from moisture. P303+P361+P353:IF ON SKIN (or hair): Remove/Take off Immediately all contaminated clothing. Rinse SKIN with water/shower. P305+P351+P338:IF IN EYES: Rinse cautiously with water for several minutes. Remove contact lenses, if present and easy to do. Continuerinsing. |
Computed Descriptors for TRIS(DIMETHYLAMINO)SILANE
New Products
4-AMINO-TETRAHYDRO-PYRAN-4-CARBOXYLIC ACID HCL 4-(Dimethylamino)tetrahydro-2H-pyran-4-carbonitrile 4-Aminotetrahydropyran-4-carbonitrile Hydrochloride (R)-3-Aminobutanenitrile Hydrochloride 3-((Dimethylamino)methyl)-5-methylhexan-2-one oxalate 1,4-Dioxa-8-azaspiro[4.5]decane 5-Bromo-2-nitropyridine Nimesulide BP Aceclofenac IP/BP/EP Diclofenac Sodium IP/BP/EP/USP Mefenamic Acid IP/BP/EP/USP Ornidazole IP Diclofenac Potassium THOMAIND PAPER PH 2.0 TO 4.5 1 BOX BUFFER CAPSULE PH 9.2 - 10 CAP SODIUM CHLORIDE 0.1N CVS ALLOXAN MONOHYDRATE 98% PLATINUM 0.5% ON 3 MM ALUMINA PELLETS (TYPE 73) LITHIUM AAS SOLUTION 2-Bromo-1-(bromomethyl)-3-chloro-5-nitrobenzene 2-Bromo-3-nitroaniline N-(3-Hydroxypropyl)-N-methylacetamide 3-Bromo-6-chloropyridazine 4-ethyl-3-nitrobenzoic acidRelated products of tetrahydrofuran
You may like
-
Tris(dimethylamino)silane CAS 15112-89-7View Details
15112-89-7 -
1-Methyl-6-oxo-1,6-dihydropyridazine-3-carbonitrile 98%View Details
99903-60-3 -
1823368-42-8 98%View Details
1823368-42-8 -
2-(3-(tert-butyl)phenoxy)-2-methylpropanoic acid 1307449-08-6 98%View Details
1307449-08-6 -
Ethyl 3-(furan-2-yl)-3-hydroxypropanoate 25408-95-1 98%View Details
25408-95-1 -
2-Chloro-5-fluoro-1-methoxy-3-methylbenzene 98%View Details
1805639-70-6 -
1784294-80-9 98%View Details
1784294-80-9 -
Lithium ClavulanateView Details
61177-44-4
Statement: All products displayed on this website are only used for non medical purposes such as industrial applications or scientific research, and cannot be used for clinical diagnosis or treatment of humans or animals. They are not medicinal or edible.