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HomeProduct name listTETRAKIS(DIMETHYLAMINO)TITANIUM

TETRAKIS(DIMETHYLAMINO)TITANIUM

Synonym(s):TDMAT;Tetrakis(dimethylamino)titanium(IV)

  • CAS NO.:3275-24-9
  • Empirical Formula: C2H7NTi
  • Molecular Weight: 92.95
  • MDL number: MFCD00014861
  • EINECS: 221-904-3
  • SAFETY DATA SHEET (SDS)
  • Update Date: 2024-12-18 14:08:57
TETRAKIS(DIMETHYLAMINO)TITANIUM Structural

What is TETRAKIS(DIMETHYLAMINO)TITANIUM?

Chemical properties

clear yellow to orange liquid

The Uses of TETRAKIS(DIMETHYLAMINO)TITANIUM

Precursors Packaged for Depositions Systems

The Uses of TETRAKIS(DIMETHYLAMINO)TITANIUM

Tetrakis(dimethylamido)titanium(IV) (TDMAT) is a precursor to titanium nitride (TiN) thin films by organometallic chemical vapor deposition (OMCVD)and titanium dioxide thin films by atomic layer deposition (ALD).TDMAT undergoes exothermal reaction with excess cyclopentadiene to yield tris(dimethylamido)(η5-cyclopentadienyl)titanium(IV).

General Description

Atomic number of base material: 22 Titanium

Properties of TETRAKIS(DIMETHYLAMINO)TITANIUM

Melting point: <4°C
Boiling point: 50 °C0.5 mm Hg(lit.)
Density  0.947 g/mL at 25 °C(lit.)
refractive index  1.55
Flash point: -22 °F
storage temp.  Flammables area
form  liquid
color  yellow to orange
Specific Gravity 0.96
Hydrolytic Sensitivity 8: reacts rapidly with moisture, water, protic solvents
Sensitive  Moisture Sensitive
CAS DataBase Reference 3275-24-9(CAS DataBase Reference)
NIST Chemistry Reference Tetrakis(dimethylamino)titanium(3275-24-9)
EPA Substance Registry System Methanamine, N-methyl-, titanium(4+) salt (3275-24-9)

Safety information for TETRAKIS(DIMETHYLAMINO)TITANIUM

Signal word Danger
Pictogram(s)
ghs
Flame
Flammables
GHS02
ghs
Corrosion
Corrosives
GHS05
GHS Hazard Statements H225:Flammable liquids
H260:Substances And Mixtures Which, In Contact With Water,Emit Flammable Gases
H314:Skin corrosion/irritation
Precautionary Statement Codes P210:Keep away from heat/sparks/open flames/hot surfaces. — No smoking.
P223:Keep away from any possible contact with water, because of violent reaction and possible flash fire.
P280:Wear protective gloves/protective clothing/eye protection/face protection.
P231+P232:Handle under inert gas. Protect from moisture.
P303+P361+P353:IF ON SKIN (or hair): Remove/Take off Immediately all contaminated clothing. Rinse SKIN with water/shower.
P305+P351+P338:IF IN EYES: Rinse cautiously with water for several minutes. Remove contact lenses, if present and easy to do. Continuerinsing.

Computed Descriptors for TETRAKIS(DIMETHYLAMINO)TITANIUM

InChIKey MNWRORMXBIWXCI-UHFFFAOYSA-N

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