TANTALUM ETHOXIDE
Synonym(s):PET;Pentaethoxytantalum;Tantalum pentaethoxide;Tantalum(V) ethoxide;Tantalum ethylate
- CAS NO.:6074-84-6
- Empirical Formula: C10H25O5Ta
- Molecular Weight: 406.25
- MDL number: MFCD00049785
- EINECS: 228-010-2
- SAFETY DATA SHEET (SDS)
- Update Date: 2023-04-23 13:52:06
What is TANTALUM ETHOXIDE?
Chemical properties
clear colorless to almost colorless liquid or
The Uses of TANTALUM ETHOXIDE
Tantalum(V) ethoxide precursor is used to deposit ultra thin films of Tantalum oxide and other tantalum containing films by atomic layer deposition and chemical vapor deposition methods
The Uses of TANTALUM ETHOXIDE
Tantalum(V) ethoxide acts as a precursor used in the preparation of ultra thin films of tantalum oxide and other tantalum containing films, which finds application in semiconductors. It is also used to prepare tantalum oxide nanoparticles for the imaging cartilage.
General Description
Tantalum(V) ethoxide Ta(OC2H5)5 is a tantalum alkoxide that can be used as a precursor in the preparation of tantalum oxide by chemical vapor deposition (CVD). It has excellent volatility and thermal stability. It can be synthesized by anodic oxidation of tantalum plate in anhydrous ethanol.
Purification Methods
Purify it by distillation under reduced pressure. It aggregates in *C6H6,EtOH, MeCN, pyridine and diisopropyl ether. [Bradley et al. J Chem Soc 726 1955, Bradley et al. J Chem Soc 5 1956, Beilstein 1 IV 1312.]
Properties of TANTALUM ETHOXIDE
Melting point: | 21 °C(lit.) |
Boiling point: | 155 °C0.01 mm Hg(lit.) |
Density | 1.566 g/mL at 25 °C(lit.) |
refractive index | n |
Flash point: | 87 °F |
storage temp. | 2-8°C |
solubility | Soluble in organic solvents. |
form | liquid |
Specific Gravity | 1.56 |
Water Solubility | Decomposes in water. Soluble in organic solvents. |
Sensitive | Moisture Sensitive/Air Sensitive |
Hydrolytic Sensitivity | 8: reacts rapidly with moisture, water, protic solvents |
BRN | 3678999 |
CAS DataBase Reference | 6074-84-6(CAS DataBase Reference) |
EPA Substance Registry System | Ethanol, tantalum(5+) salt (6074-84-6) |
Safety information for TANTALUM ETHOXIDE
Signal word | Warning |
Pictogram(s) |
Flame Flammables GHS02 |
GHS Hazard Statements |
H226:Flammable liquids |
Precautionary Statement Codes |
P210:Keep away from heat/sparks/open flames/hot surfaces. — No smoking. P233:Keep container tightly closed. P240:Ground/bond container and receiving equipment. P241:Use explosion-proof electrical/ventilating/lighting/…/equipment. P242:Use only non-sparking tools. P243:Take precautionary measures against static discharge. |
Computed Descriptors for TANTALUM ETHOXIDE
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